Invention Grant
- Patent Title: Chemical agent for forming water repellent protective film and surface treatment method for wafers
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Application No.: US16957331Application Date: 2018-12-26
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Publication No.: US11282709B2Publication Date: 2022-03-22
- Inventor: Yuki Fukui , Yoshiharu Terui , Shuhei Yamada , Yuzo Okumura , Soichi Kumon , Saori Shiota , Katsuya Kondo
- Applicant: CENTRAL GLASS COMPANY, LIMITED
- Applicant Address: JP Ube
- Assignee: CENTRAL GLASS COMPANY, LIMITED
- Current Assignee: CENTRAL GLASS COMPANY, LIMITED
- Current Assignee Address: JP Ube
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: JPJP2018-003977 20180115,JPJP2018-231703 20181211
- International Application: PCT/JP2018/047754 WO 20181226
- International Announcement: WO2019/138870 WO 20190718
- Main IPC: H01L21/306
- IPC: H01L21/306 ; C07F7/10 ; H01L21/02
Abstract:
According to the present disclosure, there is provided a water-repellent protective film-forming liquid chemical capable of achieving an improved water repellency imparting effect. The water-repellent protective film-forming liquid chemical according to the present disclosure contains the following compositions: (I) an aminosilane composition of the following general formula [1]; (II) a silicon compound of the following general formula [2]; and (III) an aprotic solvent, wherein the amount of the component (I) contained is 0.02 to 0.5 mass % based on the total amount of the components (I) to (III). (R1)aSi(H)b(NH2)4-a-b [1] (R2)cSi(H)dX4-c-d [2]
Public/Granted literature
- US20200350176A1 CHEMICAL AGENT FOR FORMING WATER REPELLENT PROTECTIVE FILM AND SURFACE TREATMENT METHOD FOR WAFERS Public/Granted day:2020-11-05
Information query
IPC分类:
