Invention Grant
- Patent Title: Interconnect and memory structures formed in the BEOL
-
Application No.: US16522233Application Date: 2019-07-25
-
Publication No.: US11282788B2Publication Date: 2022-03-22
- Inventor: Chih-Chao Yang , Baozhen Li
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent L. Jeffrey Kelly, Esq.
- Main IPC: H01L23/28
- IPC: H01L23/28 ; H01L21/3213 ; H01L21/768 ; H01L23/522 ; H01L23/528 ; H01L27/22 ; H01L27/11502 ; H01L27/24

Abstract:
A structure (interconnect or memory structure) is provided that includes a first electrically conductive structure having a concave upper surface embedded in a first interconnect dielectric material layer. A metal-containing cap having a convex bottom surface directly contacts the concave upper surface of the first electrically conductive structure. A metal-containing structure having a planar bottommost surface directly contacts a planar topmost surface of the metal-containing cap. A second electrically conductive structure contacts the planar topmost surface of the metal-containing structure. A second interconnect dielectric material layer is present on the first interconnect dielectric material layer and is located laterally adjacent to an upper portion of the metal-containing cap, the metal-containing structure, and the second electrically conductive structure.
Public/Granted literature
- US20210028107A1 INTERCONNECT AND MEMORY STRUCTURES FORMED IN THE BEOL Public/Granted day:2021-01-28
Information query
IPC分类: