Invention Grant
- Patent Title: Semiconductor device
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Application No.: US16765797Application Date: 2018-11-26
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Publication No.: US11282952B2Publication Date: 2022-03-22
- Inventor: Akihiro Hikasa
- Applicant: ROHM CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: JPJP2017-226109 20171124
- International Application: PCT/JP2018/043340 WO 20181126
- International Announcement: WO2019/103135 WO 20190531
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/10 ; H01L29/12 ; H01L29/417 ; H01L29/423 ; H01L29/49 ; H01L29/739

Abstract:
A semiconductor device includes a semiconductor layer having a main surface in which a trench is formed, a first-conductivity-type body region formed along a sidewall of the trench in a surface layer portion of the main surface of the semiconductor layer, a second-conductivity-type impurity region formed along the sidewall of the trench in a surface layer portion of the body region, a gate insulating layer formed on an inner wall of the trench, a gate electrode that is embedded in the trench and that faces the body region and the impurity region with the gate insulating layer placed between the gate electrode and the body region and between the gate electrode and the impurity region, a contact electrode that passes through the sidewall of the trench from inside the trench and is drawn out to the surface layer portion of the main surface of the semiconductor layer and is electrically connected to the body region and to the impurity region, and an embedded insulating layer that is interposed between the gate electrode and the contact electrode in the trench and that insulates the gate electrode and the contact electrode.
Public/Granted literature
- US20200287044A1 SEMICONDUCTOR DEVICE Public/Granted day:2020-09-10
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