Invention Grant
- Patent Title: Projected phase change memory devices
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Application No.: US16828328Application Date: 2020-03-24
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Publication No.: US11283015B2Publication Date: 2022-03-22
- Inventor: Timothy Mathew Philip , Nicole Saulnier , Lawrence A. Clevenger
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Randall Bluestone
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
A method of forming a phase change memory device is provided. The method includes forming a spacer layer on a substrate, and forming a heater terminal contact in the spacer layer. The method further includes forming a liner layer on the heater terminal contact and the spacer layer, and forming a heater terminal in electrical contact with the heater terminal contact in the liner layer. The method further includes forming a conductive projection segment on the heater terminal. The method further includes forming a phase change material layer on the conductive projection segment, and forming a phase change material terminal on the phase change material layer, wherein an electrical current can pass between the heater terminal and the phase change material terminal through the phase change material layer.
Public/Granted literature
- US20210305503A1 PROJECTED PHASE CHANGE MEMORY DEVICES Public/Granted day:2021-09-30
Information query
IPC分类: