Invention Grant
- Patent Title: Vibrator device, electronic apparatus, and vehicle
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Application No.: US16881082Application Date: 2020-05-22
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Publication No.: US11289246B2Publication Date: 2022-03-29
- Inventor: Junichi Takeuchi
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2019-096738 20190523
- Main IPC: H01C7/04
- IPC: H01C7/04 ; H02N2/00

Abstract:
A vibrator device includes an intermediate substrate that includes a frame having a first surface and a second surface opposite to the first surface and a vibration element and is formed of quartz crystal, a first substrate that is bonded to the first surface of the frame and is formed of the quartz crystal or glass, a second substrate that is bonded to the second surface of the frame and is formed of the quartz crystal or the glass, and a functional element that is disposed on the first substrate and includes a functional layer, in which the functional element includes a portion overlapping the vibration element in plan view.
Public/Granted literature
- US20200373043A1 Vibrator Device, Electronic Apparatus, And Vehicle Public/Granted day:2020-11-26
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