Invention Grant
- Patent Title: Conveying mechanism
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Application No.: US17195995Application Date: 2021-03-09
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Publication No.: US11289354B2Publication Date: 2022-03-29
- Inventor: Yoshinori Kakinuma , Masashi Kimura , Masayuki Kawase
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JPJP2020-061923 20200331
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/677 ; H01L21/683 ; B23Q7/04 ; B65G49/07

Abstract:
A conveying mechanism includes a suction part that has a suction pad and sucks and holds a target object by the suction pad, a bracket connected to the suction part through a joint that is swingable, an elastic component in which one end part is fixed to the suction part and the other end part is fixed to the bracket, a negative pressure control unit that controls generation of a negative pressure at the suction part, and a movement unit that moves the bracket. The elastic component permits a swing of the suction part according to tilt or deformation of the target object that is sucked and held and, when suction holding of the target object is released, the elastic component returns the orientation of the suction pad to a predetermined orientation when the suction pad is not sucking and holding the target object.
Public/Granted literature
- US20210305065A1 CONVEYING MECHANISM Public/Granted day:2021-09-30
Information query
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