Invention Grant
- Patent Title: Wiring board and manufacture method thereof
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Application No.: US16747548Application Date: 2020-01-21
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Publication No.: US11289413B2Publication Date: 2022-03-29
- Inventor: Shih-Liang Cheng
- Applicant: Unimicron Technology Corp.
- Applicant Address: TW Taoyuan
- Assignee: Unimicron Technology Corp.
- Current Assignee: Unimicron Technology Corp.
- Current Assignee Address: TW Taoyuan
- Agency: CKC & Partners Co., LLC
- Priority: TW108145180 20191210
- Main IPC: H05K1/11
- IPC: H05K1/11 ; H01L23/498 ; H01L21/48 ; H05K3/40

Abstract:
A wiring board and a method of manufacturing the same are provided. The method includes the following steps. A substrate is provided. The substrate is perforated to form at least one through hole. A first conductive layer is integrally formed on a surface of the substrate and an inner wall of the through hole. An etch stop layer is formed on a portion of the first conductive layer on the surface of the substrate and another portion of the first conductive layer on the inner wall of the through hole. A second conductive layer is integrally formed on the etch stop layer and the first conductive layer on the inner wall of the through hole. A plug-hole column is formed by filling with a plugged-hole material in the through hole. The second conductive layer is removed. The etch stop layer is then removed.
Public/Granted literature
- US20210175160A1 WIRING BOARD AND MANUFACTURE METHOD THEREOF Public/Granted day:2021-06-10
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