Invention Grant
- Patent Title: Optimised fabrication methods for a structure to be assembled by hybridisation and a device comprising such a structure
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Application No.: US16723394Application Date: 2019-12-20
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Publication No.: US11289439B2Publication Date: 2022-03-29
- Inventor: Jeannet Bernard
- Applicant: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Pearne & Gordon LLP
- Priority: FR1874362 20181228
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L33/32

Abstract:
A method of fabrication of a semiconducting structure intended to be assembled to a second support by hybridisation. The semiconducting structure comprising an active layer comprising a nitrided semiconductor. The method comprises a step for the formation of at least one first and one second insert and during this step, a nickel layer is formed in contact with the support surface, and a localised physico-chemical etching step of the active layer, a part of the active layer comprising the active region being protected by the nickel layer.
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