Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16744572Application Date: 2020-01-16
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Publication No.: US11289488B2Publication Date: 2022-03-29
- Inventor: Joongchan Shin , Jiyoung Kim , Hui-Jung Kim , Taehyun An , Eunju Cho , Hyungeun Choi , Sangyeon Han
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2019-0077319 20190627
- Main IPC: H01L27/108
- IPC: H01L27/108 ; G11C5/06

Abstract:
Disclosed is a semiconductor memory device including a stack structure including layers which are vertically stacked on a substrate and each of which includes a bit line extending in a first direction and a semiconductor pattern extending in a second direction from the bit line, a gate electrode which is in a hole penetrating the stack structure and extending along a stack of semiconductor patterns, a vertical insulating layer covering the gate electrode and filling the hole, and a data storage element electrically connected to the semiconductor pattern. The data storage element includes a first electrode, which is in a first recess of the vertical insulating layer and has a cylindrical shape whose one end is opened, and a second electrode, which includes a first protrusion in a cylinder of the first electrode and a second protrusion in a second recess of the vertical insulating layer.
Information query
IPC分类: