Microelectromechanical shutters for organic vapor jet printing
Abstract:
A device includes a nozzle including a discharge end for discharging a fluid, a shutter plate including an aperture, the shutter plate positioned at the discharge end of the nozzle, a plurality of tethers coupled to the shutter plate, and a plurality of electrostatic actuators. Each of the plurality of electrostatic actuators are coupled to one or more of the plurality of tethers. The plurality of electrostatic actuators are configured to move the shutter plate between an open position and a closed position relative the discharge end of the nozzle. In the open position, the aperture is in fluid communication with the discharge end of the nozzle to permit fluid from the discharge end of the nozzle to flow through the aperture. In the closed position, at least a portion of the shutter plate inhibits fluid from the discharge end of the nozzle from flowing through the aperture.
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