Pump and fluid control device
Abstract:
A pump includes a first pump chamber defined by a first plate-shaped body and a second plate-shaped body, a second pump chamber defined by the first plate-shaped body and a third plate-shaped body, and a driving body. The driving body causes a pressure fluctuation, by causing the first plate-shaped body to undergo bending vibration, in both the first pump chamber and the second pump chamber. The first plate-shaped body is provided with a plurality of first hole portions that does not overlap with an axis orthogonal to the central portion of the first plate-shaped body, and a check valve is attached to each of the plurality of first hole portions. The second plate-shaped body and the third plate-shaped body are respectively provided with second hole portions and third hole portions, and no check valve is attached to the second hole portions and the third hole portions.
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