Invention Grant
- Patent Title: Turbo-molecular pump blade design
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Application No.: US16731158Application Date: 2019-12-31
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Publication No.: US11293447B2Publication Date: 2022-04-05
- Inventor: Keiichi Futagi
- Applicant: SHIMADZU CORPORATION
- Applicant Address: JP Kyoto
- Assignee: SHIMADZU CORPORATION
- Current Assignee: SHIMADZU CORPORATION
- Current Assignee Address: JP Kyoto
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- Priority: JPJP2019-014470 20190130
- Main IPC: F04D19/04
- IPC: F04D19/04 ; F04D29/54 ; F04D17/16 ; F04D29/32

Abstract:
A turbo molecular pump including multiple stages. At least one of the multiple stages of the rotor blades and the multiple stages of the stator blades is configured to satisfy any one of a first condition of Xout Xc>Xout where α=1.04, or a third condition of Xin
Public/Granted literature
- US20200240421A1 TURBO-MOLECULAR PUMP Public/Granted day:2020-07-30
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