Invention Grant
- Patent Title: Method and apparatus for carrying out a time-resolved interferometric measurement
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Application No.: US16493610Application Date: 2018-02-27
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Publication No.: US11293747B2Publication Date: 2022-04-05
- Inventor: Michael Lehmann , Tore Niermann , Tolga Wagner
- Applicant: Technische Universitaet Berlin
- Applicant Address: DE Berlin
- Assignee: Technische Universitaet Berlin
- Current Assignee: Technische Universitaet Berlin
- Current Assignee Address: DE Berlin
- Agency: Gordon Rees Scully Mansukhani, LLP
- Priority: EP17160812 20170314
- International Application: PCT/EP2018/054806 WO 20180227
- International Announcement: WO2018/166786 WO 20180920
- Main IPC: G01B9/021
- IPC: G01B9/021 ; H01J37/26 ; G03H5/00 ; G03H1/02 ; G03H1/22 ; G03H1/26 ; G03H1/00 ; G03H1/04 ; G03H1/18

Abstract:
An embodiment of the invention relates to a method for carrying out a time-resolved interferometric measurement comprising the steps of generating at least two coherent waves, overlapping said at least two coherent waves and producing an interference pattern, measuring the interference pattern for a given exposure time, thereby forming measured interference values, and analyzing the measured interference values and extracting amplitude and/or phase information from the measured interference values. In at least one time segment, hereinafter referred to as disturbed time segment, of the expo-sure time, the interference pattern is intentionally disturbed or destroyed such that the corresponding measured interference values describe a disturbed or destroyed interference pattern. In at least one other time segment, hereinafter referred to as undisturbed time segment, of the exposure time, the interference pattern is undisturbed or at least less disturbed compared to the disturbed time segment such that the corresponding measured interference values describe an undisturbed or less disturbed interference pattern. The measured interference values that were measured during the entire given exposure time, are filtered, wherein those interference values that were measured during the at least one disturbed time segment, are reduced, suppressed or discarded. The filtered interference values are analyzed and the amplitude and/or phase information is extracted from the filtered interference values.
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