Invention Grant
- Patent Title: Vibrator device
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Application No.: US17005466Application Date: 2020-08-28
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Publication No.: US11293755B2Publication Date: 2022-04-05
- Inventor: Seiichiro Ogura , Keiichi Yamaguchi , Ryuta Nishizawa
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2019-156779 20190829
- Main IPC: G01C19/5642
- IPC: G01C19/5642

Abstract:
A vibrator device includes a vibrator element, a base, and a support configured to support the vibrator element with respect to the base. The support includes a frame shaped like a frame, a base mount disposed outside the frame, and fixed to the base, an element holder which is disposed inside the frame, and on which the vibrator element is mounted, a pair of first beams which extend along a first direction from the element holder, and couple the element holder and the frame to each other, and a pair of second beams which extend along a second direction from the frame, and couple the frame and the base mount to each other, and W12/L1
Public/Granted literature
- US20210063155A1 VIBRATOR DEVICE Public/Granted day:2021-03-04
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