Invention Grant
- Patent Title: Temperature measurement member, inspection apparatus, and temperature measurement method
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Application No.: US16720586Application Date: 2019-12-19
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Publication No.: US11293814B2Publication Date: 2022-04-05
- Inventor: Yoshihito Yamasaki , Shinya Kurebayashi , Jun Mochizuki , Miyoko Kuroda
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer; Tanya E. Harkins
- Priority: JPJP2018-246831 20181228
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01K13/00 ; G01R31/26 ; G01K7/00 ; G01R1/073 ; G01K1/14 ; G01R31/28 ; G01K11/00 ; G01K7/18

Abstract:
A temperature measurement member measures a temperature of an inspection object or a temperature of a mounting table on which the inspection object is placed inside an inspection apparatus that inspects the inspection object. The temperature measurement member is attached to an attachment position of a probe card used for electrical characteristic inspection in the inspection apparatus, and includes a main body having substantially a same shape as the probe card; a probe formed to extend from the main body toward the mounting table in a state in which the temperature measurement member is attached to the attachment position; and a temperature sensor configured to measure the temperature of the inspection object or the mounting table. The sensor transmits/receives a temperature measurement-related electrical signal to/from an inspection part via the probe card in the electrical characteristic inspection, and transmits a temperature measurement result to the inspection part.
Public/Granted literature
- US20200209072A1 Temperature Measurement Member, Inspection Apparatus, and Temperature Measurement Method Public/Granted day:2020-07-02
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