Invention Grant
- Patent Title: Defect detecting device and defect detecting method
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Application No.: US16713835Application Date: 2019-12-13
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Publication No.: US11293877B2Publication Date: 2022-04-05
- Inventor: Ryohei Kuri
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JPJP2018-234128 20181214
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G01N21/55

Abstract:
A defect detecting device includes an illumination that irradiates a measuring object with illumination light, an imager that images the illumination light reflected by the measuring object, and a detector that detects a defect at a surface of the measuring object based on a captured image obtained by imaging the illumination light by the imager. The captured image includes a plurality of spectral images having different spectral wavelengths, and the detector detects a diffuse reflection region by which the illumination light is diffusely reflected based on the plurality of spectral images, and determines a size of the defect based on the spectral wavelength of the spectral image in which the diffuse reflection region is detected.
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