Invention Grant
- Patent Title: Process for manufacturing a MEMS micromirror device, and associated device
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Application No.: US16985818Application Date: 2020-08-05
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Publication No.: US11294168B2Publication Date: 2022-04-05
- Inventor: Enri Duqi , Lorenzo Baldo , Roberto Carminati , Flavio Francesco Villa
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Crowe & Dunlevy
- Priority: IT102016000079455 20160728
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81C1/00 ; B81B7/02 ; G02B26/10 ; H04N9/31

Abstract:
A MEMS micromirror device includes a monolithic body of semiconductor material having a first main surface and a second main surface, with the monolithic body having an opening extending from the second main surface and including a suspended membrane of monocrystalline semiconductor material extending between the opening and the first main surface of the monolithic body. The suspended membrane includes a supporting frame and a mobile mass carried by the supporting frame and rotatable about an axis parallel to the first main surface, with the mobile mass having a width less than a width of the opening. A reflecting region extends over the mobile mass.
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