Invention Grant
- Patent Title: Reflective photomask blank and reflective photomask
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Application No.: US16626290Application Date: 2018-06-29
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Publication No.: US11294270B2Publication Date: 2022-04-05
- Inventor: Norihito Fukugami , Toru Komizo
- Applicant: TOPPAN PRINTING CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TOPPAN PRINTING CO., LTD.
- Current Assignee: TOPPAN PRINTING CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Squire Patton Boggs (US) LLP
- Priority: JPJP2017-132026 20170705
- International Application: PCT/JP2018/024889 WO 20180629
- International Announcement: WO2019/009211 WO 20191001
- Main IPC: G03F1/24
- IPC: G03F1/24

Abstract:
A reflective photomask blank (10) of a first aspect includes a substrate (1); a reflective layer (2) formed on the substrate (1); and a light absorbing layer (4) formed on the reflective layer (2). The light absorbing layer (4) includes a tin oxide film with an atomic ratio (O/Sn) of oxygen (O) to tin (Sn) being more than 1.50 and equal to or less than 2.0, and with a film thickness of 25 nm or more and 45 nm or less. Consequently, the shadowing effect of a reflective photomask for pattern transfer using extreme ultraviolet light as a light source is suppressed or reduced to improve the performance of transfer to a semiconductor substrate, and further, the cleaning resistance of the light absorbing layer is improved.
Public/Granted literature
- US20200159106A1 REFLECTIVE PHOTOMASK BLANK AND REFLECTIVE PHOTOMASK Public/Granted day:2020-05-21
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