• Patent Title: Structure comprising single-crystal semiconductor islands and process for making such a structure
  • Application No.: US16337206
    Application Date: 2017-09-21
  • Publication No.: US11295950B2
    Publication Date: 2022-04-05
  • Inventor: David SottaJean-Marc BethouxOleg Kononchuk
  • Applicant: Soitec
  • Applicant Address: FR Bernin
  • Assignee: Soitec
  • Current Assignee: Soitec
  • Current Assignee Address: FR Bernin
  • Agency: TraskBritt
  • Priority: FR1659343 20160929
  • International Application: PCT/FR2017/052529 WO 20170921
  • International Announcement: WO2018/060570 WO 20180405
  • Main IPC: H01L21/02
  • IPC: H01L21/02
Structure comprising single-crystal semiconductor islands and process for making such a structure
Abstract:
A structure that can be used to manufacture at least one active layer made of a III-V material thereon includes a substrate comprising a carrier having a main face, a dielectric layer located on the main face of the carrier, and a plurality of single-crystal semiconductor islands located directly on the dielectric layer. The islands have an upper surface in order to serve as a seed surface for the growth of the active layer. The structure further comprises a seed layer located between the single-crystal semiconductor islands, directly on the portion of the dielectric layer that is not covered by the islands, without masking the upper surface of the islands, so that the dielectric layer is not exposed to the external environment.
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