Invention Grant
- Patent Title: Microfabrication techniques and devices for thermal management of electronic devices
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Application No.: US16340487Application Date: 2017-10-04
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Publication No.: US11295963B2Publication Date: 2022-04-05
- Inventor: Mohamed Tarek Ghoneim , Muhammad Mustafa Hussain
- Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Applicant Address: SA Thuwal
- Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: SA Thuwal
- Agency: Patent Portfolio Builders PLLC
- International Application: PCT/IB2017/056127 WO 20171004
- International Announcement: WO2018/087612 WO 20180517
- Main IPC: H01L21/48
- IPC: H01L21/48 ; H01L21/762 ; H01L23/373 ; H01L23/367 ; F28F21/08

Abstract:
A method of fabricating a thermal management device. The method includes depositing a seed layer, using a seed layer depositing technique, on a side of a support base; growing a heat sink base layer on a side of the seed layer; depositing a hard mask on a side of the support base directly opposite that containing the seed and heat sink base layers; patterning the hard mask with a photoresist mask; etching the patterned hard mask with an etching technique, wherein the etching creates trenches in the underlying support base, exposing the seed layer; removing the hard mask with a hard mask removal technique; depositing a layer of photoresist on the heat sink base layer; growing heat sinks using a heat sink growth technique on the exposed seed layer; removing the photoresist layer with a photoresist layer removal technique; and removing the support base with a support base removal technique.
Public/Granted literature
- US20190244832A1 MICROFABRICATION TECHNIQUES AND DEVICES FOR THERMAL MANAGEMENT OF ELECTRONIC DEVICES Public/Granted day:2019-08-08
Information query
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