Invention Grant
- Patent Title: Semiconductor device and method for manufacturing the same
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Application No.: US16772263Application Date: 2018-12-07
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Publication No.: US11296020B2Publication Date: 2022-04-05
- Inventor: Hitoshi Okano , Hiroyuki Kawashima
- Applicant: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Sheridan Ross P.C.
- Priority: JPJP2017-244941 20171221
- International Application: PCT/JP2018/045035 WO 20181207
- International Announcement: WO2019/124112 WO 20190627
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L21/768 ; H01L23/528 ; H01L49/02 ; H01L25/065

Abstract:
The present technology relates to a semiconductor device in which a MIM capacitive element can be formed without any process damage, and a method for manufacturing the semiconductor device. In a semiconductor device, wiring layers of a first multilayer wiring layer formed on a first semiconductor substrate and a second multilayer wiring layer formed on a second semiconductor substrate are bonded to each other by wafer bonding. The semiconductor device includes a capacitive element including an upper electrode, a lower electrode, and a capacitive insulating film between the upper electrode and the lower electrode. One electrode of the upper electrode and the lower electrode is formed with a first conductive layer of the first multilayer wiring layer and a second conductive layer of the second multilayer wiring layer. The present technology can be applied to a semiconductor device or the like formed by joining two semiconductor substrates, for example.
Public/Granted literature
- US20210090987A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2021-03-25
Information query
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