Invention Grant
- Patent Title: Semiconductor chip mounting device and method for manufacturing semiconductor device
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Application No.: US16338700Application Date: 2017-09-29
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Publication No.: US11296048B2Publication Date: 2022-04-05
- Inventor: Tomonori Nakamura , Toru Maeda
- Applicant: SHINKAWA LTD.
- Applicant Address: JP Tokyo
- Assignee: SHINKAWA LTD.
- Current Assignee: SHINKAWA LTD.
- Current Assignee Address: JP Tokyo
- Agency: JCIPRNET
- Priority: JPJP2016-198434 20161006
- International Application: PCT/JP2017/035419 WO 20170929
- International Announcement: WO2018/066462 WO 20180412
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L25/065 ; H01L25/00

Abstract:
Provided is a mounting device in which two or more semiconductor chips are laminated and mounted at a plurality of locations on a substrate, said mounting device including: a stage that supports the substrate; a bonding part that laminates and mounts the plurality of semiconductor chips on the substrate while heating the plurality of semiconductor chips and the substrate; and a heat insulating member that is interposed between the stage and the substrate, said heat insulating member including a first layer which is in contact with the substrate and to which heat is applied from the bonding part via the semiconductor chips and the substrate, and a second layer which is disposed closer to the stage side than the first layer, wherein the first layer has a larger heat resistance than the second layer.
Public/Granted literature
- US20210257329A1 SEMICONDUCTOR CHIP MOUNTING DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2021-08-19
Information query
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