• Patent Title: Semiconductor chip mounting device and method for manufacturing semiconductor device
  • Application No.: US16338700
    Application Date: 2017-09-29
  • Publication No.: US11296048B2
    Publication Date: 2022-04-05
  • Inventor: Tomonori NakamuraToru Maeda
  • Applicant: SHINKAWA LTD.
  • Applicant Address: JP Tokyo
  • Assignee: SHINKAWA LTD.
  • Current Assignee: SHINKAWA LTD.
  • Current Assignee Address: JP Tokyo
  • Agency: JCIPRNET
  • Priority: JPJP2016-198434 20161006
  • International Application: PCT/JP2017/035419 WO 20170929
  • International Announcement: WO2018/066462 WO 20180412
  • Main IPC: H01L23/00
  • IPC: H01L23/00 H01L25/065 H01L25/00
Semiconductor chip mounting device and method for manufacturing semiconductor device
Abstract:
Provided is a mounting device in which two or more semiconductor chips are laminated and mounted at a plurality of locations on a substrate, said mounting device including: a stage that supports the substrate; a bonding part that laminates and mounts the plurality of semiconductor chips on the substrate while heating the plurality of semiconductor chips and the substrate; and a heat insulating member that is interposed between the stage and the substrate, said heat insulating member including a first layer which is in contact with the substrate and to which heat is applied from the bonding part via the semiconductor chips and the substrate, and a second layer which is disposed closer to the stage side than the first layer, wherein the first layer has a larger heat resistance than the second layer.
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