Invention Grant
- Patent Title: Dynamic random access memory and method of forming the same
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Application No.: US17024717Application Date: 2020-09-18
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Publication No.: US11296091B2Publication Date: 2022-04-05
- Inventor: Li-Peng Chang , San-Jung Chang
- Applicant: Powerchip Semiconductor Manufacturing Corporation
- Applicant Address: TW Hsinchu
- Assignee: Powerchip Semiconductor Manufacturing Corporation
- Current Assignee: Powerchip Semiconductor Manufacturing Corporation
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Priority: TW109128793 20200824
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L21/764 ; H01L21/768

Abstract:
Provided is a dynamic random access memory (DRAM) including a substrate, a plurality of word-line sets, a plurality of bit-line structures, a plurality of capacitors, a plurality of capacitor contacts, and a plurality of air gaps. The substrate has a plurality of active areas. The word-line sets extend along a Y direction and disposed in the substrate. The bit-line structures extend along a X direction, disposed on the substrate, and across the word-line sets. The capacitors are respectively disposed at two terminals of the active areas. The capacitor contacts are respectively disposed between the capacitors and the active regions. The air gaps are disposed in a plurality of spaces enclosed by the bit-line structures and the capacitor contacts. A method of forming a DRAM is also provided.
Public/Granted literature
- US20220059546A1 DYNAMIC RANDOM ACCESS MEMORY AND METHOD OF FORMING THE SAME Public/Granted day:2022-02-24
Information query
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