Invention Grant
- Patent Title: Deep trench capacitor distribution
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Application No.: US16804062Application Date: 2020-02-28
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Publication No.: US11296093B2Publication Date: 2022-04-05
- Inventor: Asaf Regev , Christopher Berry , Ofer Geva , Amit Amos Atias , Timothy A. Schell
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Jeffrey Ingalls
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/66 ; H01L49/02

Abstract:
A method for distributing deep trench (DT) capacitance in an integrated circuit (IC) design is provided. The method includes forming a placement block that includes blockages defining openings in interstitial regions among the blockages, superimposing the placement block over the IC design and providing distributed DT capacitance to the IC design. The providing of the distributed DT capacitance includes adding DT capacitance cells through the openings to portions of the IC design where there are no reserved blocks.
Public/Granted literature
- US20210272963A1 DEEP TRENCH CAPACITOR DISTIBUTION Public/Granted day:2021-09-02
Information query
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