Invention Grant
- Patent Title: Nonvolatile ternary memory device using two-dimensional ferroelectric material and method of manufacturing the same
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Application No.: US16699994Application Date: 2019-12-02
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Publication No.: US11296098B2Publication Date: 2022-04-05
- Inventor: Jun Hee Lee , Ho Sik Lee
- Applicant: UNIST (ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
- Applicant Address: KR Ulsan
- Assignee: UNIST (ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
- Current Assignee: UNIST (ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
- Current Assignee Address: KR Ulsan
- Agency: Studebaker & Brackett PC
- Priority: KR10-2019-0146132 20191114
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L27/11507 ; G11C15/04 ; H01L49/02

Abstract:
The present disclosure relates to a nonvolatile ternary memory device using a two-dimensional ferroelectric material and a method of manufacturing the same. The method of manufacturing the nonvolatile ternary memory device according to an embodiment of the present disclosure includes (a) forming a lower electrode on a substrate, (b) forming a two-dimensional ferroelectric material on the lower electrode, (c) forming a semiconductor on the two-dimensional ferroelectric material, and (d) forming an upper electrode on the semiconductor.
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Information query
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