- Patent Title: Semiconductor memory device and method for manufacturing the same
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Application No.: US17335214Application Date: 2021-06-01
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Publication No.: US11296114B2Publication Date: 2022-04-05
- Inventor: Yoshiaki Fukuzumi , Shinya Arai , Masaki Tsuji , Hideaki Aochi , Hiroyasu Tanaka
- Applicant: KIOXIA CORPORATION
- Applicant Address: JP Minato-ku
- Assignee: KIOXIA CORPORATION
- Current Assignee: KIOXIA CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2014-021747 20140206
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L29/66 ; H01L29/792 ; H01L27/11575 ; H01L27/11565 ; H01L29/423

Abstract:
A semiconductor memory device includes a connecting member including a semiconductor material, a first electrode film, a first insulating film, a stacked body and three or more semiconductor pillars. The stacked body includes second electrode films and second insulating films that alternately stacked. The semiconductor pillars are arrayed along two or more directions, extend in a stacking direction, pierce through the stacked body and the first insulating film, and are connected to the connecting member. The device includes a third insulating film provided between the semiconductor pillars and the stacked body and between the connecting member and the first electrode film. A charge storage layer is provided at least between one of the second electrode films and the third insulating film.
Public/Granted literature
- US20210288073A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2021-09-16
Information query
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