Invention Grant
- Patent Title: Nitride semiconductor device
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Application No.: US16249366Application Date: 2019-01-16
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Publication No.: US11296193B2Publication Date: 2022-04-05
- Inventor: Taketoshi Tanaka
- Applicant: ROHM CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: JPJP2018-014076 20180130
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/20 ; H01L29/51 ; H01L29/778 ; H01L29/423 ; H01L29/49 ; H01L29/45 ; H01L29/10 ; H01L29/207 ; H01L29/40

Abstract:
A nitride semiconductor device 1 includes a first nitride semiconductor layer 4, constituting an electron transit layer, a second nitride semiconductor layer 5, formed on the first nitride semiconductor layer 4 and constituting an electron supply layer, a nitride semiconductor gate layer 6, disposed on the second nitride semiconductor layer 5 and containing an acceptor type impurity, a metal film 7, formed on the nitride semiconductor gate layer 6, and a gate pad 23, connected to the metal film 7 via a gate insulating film 8 having a first surface and a second surface, the first surface of the gate insulating film 8 is electrically connected directly or via a metal to the metal film 7, and the second surface of the gate insulating film 8 is electrically connected directly or via a metal to the gate pad 23.
Public/Granted literature
- US20190237551A1 NITRIDE SEMICONDUCTOR DEVICE Public/Granted day:2019-08-01
Information query
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