Invention Grant
- Patent Title: Electromagnetic wave detector and electromagnetic wave detector array including the same
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Application No.: US16960215Application Date: 2018-08-28
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Publication No.: US11296251B2Publication Date: 2022-04-05
- Inventor: Shimpei Ogawa , Masaaki Shimatani , Shoichiro Fukushima
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Chiyoda-ku
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Chiyoda-ku
- Agency: Xsensus LLP
- Priority: JPJP2018-039574 20180306
- International Application: PCT/JP2018/031723 WO 20180828
- International Announcement: WO2019/171622 WO 20190912
- Main IPC: H01L31/062
- IPC: H01L31/062 ; H01L31/113 ; H01L31/0224 ; H01L31/0288

Abstract:
An electromagnetic wave detector includes: an insulating film having a first surface and a second surface facing the first surface; a first layer to perform photoelectric conversion by an incident electromagnetic wave and change in potential, the first layer being made of a first two-dimensional atomic layer material; and a second layer to receive the change in potential through the first insulating film and generate change in electrical quantity, the second layer being made of a second two-dimensional atomic layer material and provided on the first surface. In this manner, the sensitive electromagnetic wave detector detecting an incident electromagnetic wave as change in electrical quantity and having high response speed to an incident electromagnetic wave can be provided.
Information query
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