Invention Grant
- Patent Title: Manufacturing method of light-emitting element
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Application No.: US16751589Application Date: 2020-01-24
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Publication No.: US11296255B2Publication Date: 2022-04-05
- Inventor: Kosuke Sato , Kazuya Nakao
- Applicant: NICHIA CORPORATION
- Applicant Address: JP Anan
- Assignee: NICHIA CORPORATION
- Current Assignee: NICHIA CORPORATION
- Current Assignee Address: JP Anan
- Agency: Foley & Lardner LLP
- Priority: JPJP2019-012935 20190129
- Main IPC: H01L33/40
- IPC: H01L33/40 ; H01L33/38 ; H01L33/26

Abstract:
A method of manufacturing a light-emitting element including, in the following order, steps of: preparing a wafer on which a semiconductor layer including an light-emission layer is formed; forming a resist film comprising a main body and a protrusion; forming a first metal film; forming a second metal film on the resist film and on the first metal film; pulling the protrusion of the resist film upward by raising and then lowering a temperature of the wafer; forming a third metal film on the second metal film and covering an end of the first metal film by the third metal film; and removing the resist film. In the step of forming the second metal film, the end of the first metal film is exposed from the second metal film.
Public/Granted literature
- US20200243717A1 MANUFACTURING METHOD OF LIGHT-EMITTING ELEMENT Public/Granted day:2020-07-30
Information query
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