Invention Grant
- Patent Title: Optical test apparatus and optical test method
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Application No.: US17032161Application Date: 2020-09-25
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Publication No.: US11297308B2Publication Date: 2022-04-05
- Inventor: Hiroshi Ohno , Hiroya Kano
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner L.L.P.
- Priority: JPJP2018-099203 20180523
- Main IPC: G01J3/02
- IPC: G01J3/02 ; H04N17/00 ; H04N5/225 ; G02B5/20

Abstract:
According to one embodiment, an optical test apparatus includes a first optical system, a second optical system, and an image sensor. The first optical system is configured to pass a light ray of a first wavelength and having telecentricity on an object side for the light ray of the first wavelength. The second optical system is configured to pass a light ray of a second wavelength different from the first wavelength. The image sensor is configured to image an object based on the light ray of the first wavelength having passed through the first optical system and the light ray of the second wavelength having passed through the second optical system.
Public/Granted literature
- US20210014476A1 OPTICAL TEST APPARATUS AND OPTICAL TEST METHOD Public/Granted day:2021-01-14
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