Invention Grant
- Patent Title: Protective sheet disposing method
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Application No.: US16375041Application Date: 2019-04-04
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Publication No.: US11298928B2Publication Date: 2022-04-12
- Inventor: Takashi Mori , Yoshikuni Migiyama , Yuta Taniyama , Mitsuru Ikushima , Shinichi Namioka , Makoto Saito , Emiko Kawamura , Yoshinori Kakinuma , Kazuki Sugiura
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain, Ltd.
- Priority: JPJP2018-074505 20180409
- Main IPC: B32B37/02
- IPC: B32B37/02 ; H01L23/00 ; B32B37/12 ; C09J5/00 ; B32B38/00

Abstract:
A protective sheet disposing method of disposing a protective sheet on a top surface of a wafer in which a device region having a plurality of devices formed thereon and a peripheral surplus region surrounding the device region are formed, the protective sheet disposing method including: a first protective sheet preparing step of preparing a first protective sheet having a non-adhesive portion corresponding to the device region and an adhesive portion having an adhesive layer laid on a periphery of the non-adhesive portion; a protective sheet affixing step of affixing the first protective sheet to the peripheral surplus region; a liquid resin dropping step of dropping a liquid resin onto a region of a second protective sheet; an integrating step of integrating the first protective sheet and the second protective sheet with each other; and a cutting step of cutting the first protective sheet and the second protective sheet.
Public/Granted literature
- US20190308399A1 PROTECTIVE SHEET DISPOSING METHOD Public/Granted day:2019-10-10
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