Invention Grant
- Patent Title: Multiple-stage method of investigating surfaces and corresponding apparatus
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Application No.: US14749281Application Date: 2015-06-24
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Publication No.: US11300406B2Publication Date: 2022-04-12
- Inventor: Christopher Groh
- Applicant: BYK-GARDNER GMBH
- Applicant Address: DE Geretsried
- Assignee: BYK-GARDNER GMBH
- Current Assignee: BYK-GARDNER GMBH
- Current Assignee Address: DE Geretsried
- Agency: Hayes Soloway P.C.
- Priority: DE102014108789.5 20140624
- Main IPC: G01B11/30
- IPC: G01B11/30

Abstract:
A multiple-stage method of determining surface properties, with the steps: determining at least one topographical property of at least one region of a surface to be investigated, determining an optical property of at least this region of the surface to be investigated and emitting at least one value which is characteristic of this optical property. When the value which is characteristic of this optical property is determined, the topographical property of the region is taken into consideration.
Public/Granted literature
- US20150369595A1 MULTIPLE-STAGE METHOD OF INVESTIGATING SURFACES AND CORRESPONDING APPARATUS Public/Granted day:2015-12-24
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