Multiple-stage method of investigating surfaces and corresponding apparatus
Abstract:
A multiple-stage method of determining surface properties, with the steps: determining at least one topographical property of at least one region of a surface to be investigated, determining an optical property of at least this region of the surface to be investigated and emitting at least one value which is characteristic of this optical property. When the value which is characteristic of this optical property is determined, the topographical property of the region is taken into consideration.
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