Invention Grant
- Patent Title: Automatic defect classification
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Application No.: US16619941Application Date: 2018-06-14
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Publication No.: US11300521B2Publication Date: 2022-04-12
- Inventor: Menachem Regensburger , Daniel Buzaglo
- Applicant: Camtek Ltd.
- Applicant Address: IL Migdal Haemeq
- Assignee: Camtek Ltd.
- Current Assignee: Camtek Ltd.
- Current Assignee Address: IL Migdal Haemeq
- Agency: Reches Patents
- International Application: PCT/IB2018/054382 WO 20180614
- International Announcement: WO2018/229709 WO 20181220
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G01N21/95 ; G06T7/00

Abstract:
A method for automatic defect classification, the method may include (i) acquiring, by a first camera, at least one first image of at least one area of an object; (ii) processing the at least one first image to detect a group of suspected defects within the at least one area; (iii) performing a first classification process for initially classifying the group of suspected defects; (iii) determining whether a first subgroup of the suspected defects requires additional information from a second camera for a completion of a classification; (iv) when determining that the first subgroup of the suspected defects requires additional information from the second camera then: (a) acquiring second images, by the second camera, of the first subgroup of the suspected defects; and (b) performing a second classification process for classifying the first subgroup of suspected defects.
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