Invention Grant
- Patent Title: Integrated sensor apparatus with pressure sensing element and flow sensing element
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Application No.: US16376678Application Date: 2019-04-05
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Publication No.: US11300535B2Publication Date: 2022-04-12
- Inventor: Richard Charles Sorenson , Steven Lowery , Ian Bentley
- Applicant: Honeywell International Inc.
- Applicant Address: US NJ Morris Plains
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morris Plains
- Agency: Alston & Bird LLP
- Main IPC: G01N27/12
- IPC: G01N27/12 ; G01F1/69 ; G01K7/16 ; G01L9/00 ; H05B3/00
Abstract:
An apparatus for calculating a thermal conductivity of a gaseous substance is provided. The apparatus includes a substrate; a cover member disposed on the substrate, wherein the cover member comprises a flow tunnel for the gaseous substance; a flow sensing element disposed on the substrate, wherein the flow sensing element is exposed to the gaseous substance in the flow tunnel; and a pressure sensing element disposed on the substrate, wherein the pressure sensing element is exposed to the gaseous substance in the flow tunnel.
Public/Granted literature
- US20200319127A1 INTEGRATED SENSOR APPARATUS WITH PRESSURE SENSING ELEMENT AND FLOW SENSING ELEMENT Public/Granted day:2020-10-08
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