Invention Grant
- Patent Title: Semiconductor device and oscillator
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Application No.: US16999200Application Date: 2020-08-21
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Publication No.: US11302632B2Publication Date: 2022-04-12
- Inventor: Noboru Itomi
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2019-151835 20190822
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L23/552 ; H01L23/528 ; H03B5/30

Abstract:
A semiconductor device includes a first high resistance pattern and a second high resistance pattern that are disposed along an X axis and are separated from each other, a coupling pattern that couples the first high resistance pattern and the second high resistance pattern, and a signal wiring disposed at a layer above the first high resistance pattern, the second high resistance pattern, and the coupling pattern. The coupling pattern includes a first portion that overlaps an end portion of the first high resistance pattern in a plan view at the layer above the first high resistance pattern, the coupling pattern includes a second portion that overlaps an end portion of the second high resistance pattern in a plan view at a layer above the second high resistance pattern, and the signal wiring is disposed along a Y axis that intersects the X axis in a plan view between an end of the coupling pattern at the first portion side and an end of the coupling pattern at the second portion side.
Public/Granted literature
- US20210057338A1 SEMICONDUCTOR DEVICE AND OSCILLATOR Public/Granted day:2021-02-25
Information query
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