Invention Grant
- Patent Title: Semiconductor structure and method for fabricating the same
-
Application No.: US17034335Application Date: 2020-09-28
-
Publication No.: US11302803B2Publication Date: 2022-04-12
- Inventor: Haiyang Zhang , Panpan Liu
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai; CN Beijing
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai; CN Beijing
- Agency: Anova Law Group, PLLC
- Priority: CN201911071524.9 20191105
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/94 ; H01L29/66 ; H01L29/06 ; H01L27/088 ; H01L29/78 ; H01L29/417

Abstract:
Semiconductor structure and fabrication method are provided. The method includes providing a substrate including a first region and a second region; forming a plurality of fins on the first region of the substrate; forming a first isolation structure on the first region and the second region of the substrate; forming a gate structure and a dummy gate structure each across fins and the first isolation structure at the first region; forming an epitaxial layer in each fin on two sides of the gate structure; forming a first opening by etching a portion of each of the first isolation structure and the substrate that are at the second region; filling the first opening with a conductive material layer; removing the dummy gate structure and a portion of the conductive material layer in the first opening to form a power rail; and forming a second isolation structure in a second opening.
Public/Granted literature
- US20210134976A1 SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2021-05-06
Information query
IPC分类: