Invention Grant
- Patent Title: Devices having a semiconductor material that is semimetal in bulk and methods of forming the same
-
Application No.: US17079853Application Date: 2020-10-26
-
Publication No.: US11302804B2Publication Date: 2022-04-12
- Inventor: Jean-Pierre Colinge , Carlos H Diaz , Yee-Chia Yeo
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Slater Matsil, LLP
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/02 ; H01L29/267 ; H01L29/78 ; H01L27/088 ; H01L29/04 ; H01L29/10 ; H01L21/477 ; H01L21/8234 ; H01L21/8256 ; H01L29/786 ; H01L27/06 ; H01L21/8258 ; H01L27/12 ; H01L29/423 ; H01L21/426 ; H01L21/441 ; H01L21/461 ; H01L21/762 ; H01L21/768 ; H01L29/06 ; H01L29/08 ; H01L29/24 ; H01L21/8238 ; H01L27/092

Abstract:
Devices, and methods of forming such devices, having a material that is semimetal when in bulk but is a semiconductor in the devices are described. An example structure includes a substrate, a first source/drain contact region, a channel structure, a gate dielectric, a gate electrode, and a second source/drain contact region. The substrate has an upper surface. The channel structure is connected to and over the first source/drain contact region, and the channel structure is over the upper surface of the substrate. The channel structure has a sidewall that extends above the first source/drain contact region. The channel structure comprises a bismuth-containing semiconductor material. The gate dielectric is along the sidewall of the channel structure. The gate electrode is along the gate dielectric. The second source/drain contact region is connected to and over the channel structure.
Public/Granted literature
- US20210043756A1 Devices Having a Semiconductor Material That Is Semimetal in Bulk and Methods of Forming the Same Public/Granted day:2021-02-11
Information query
IPC分类: