Encapsulation structure with sub-film layers and encapsulating method thereoff
Abstract:
The present disclosure is related to an encapsulating method that may include forming an inorganic film layer covering a structure to be encapsulated. The inorganic film layer may include at least two sub-film layers. Among the at least two sub-film layers, densification of a sub-film layer farther away from the structure to be encapsulated may be greater than densification of a sub-film layer closer to the structure to be encapsulated.
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