Radiation source and device for feeding back emitted radiation to a laser source

Invention Grant

US11303092B2 Radiation source and device for feeding back emitted radiation to a laser source 有权

Patent Title: Radiation source and device for feeding back emitted radiation to a laser source
Application No.: US17152425

Application Date: 2021-01-19
Publication No.: US11303092B2

Publication Date: 2022-04-12
Inventor: Udo Dinger
Applicant: Carl Zeiss SMT GmbH
Applicant Address: DE Oberkochen
Assignee: Carl Zeiss SMT GmbH
Current Assignee: Carl Zeiss SMT GmbH
Current Assignee Address: DE Oberkochen
Agency: Fish & Richardson P.C.
Priority: DE102018212224.5 20180723
Main IPC: G03F7/20
IPC: G03F7/20 ; H01S3/09 ; H01S3/10 ; G21K1/06

Abstract:

An FEL includes a feedback device for feeding back emitted illumination radiation.

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Espacenet

IPC分类:

G	物理
G03	摄影术；电影术；利用了光波以外其他波的类似技术；电记录术；全息摄影术
G03F	图纹面的照相制版工艺，例如，印刷工艺、半导体器件的加工工艺；其所用材料；其所用原版；其所用专用设备（照相排版装置入B41B；为摄影用的感光材料或处理入G03C；电记录、感光层或处理入G03G）
G03F7/00	图纹面，例如，印刷表面的照相制版如光刻工艺；图纹面照相制版用的材料，如：含光致抗蚀剂的材料；图纹面照相制版的专用设备（用于特殊工艺的光致抗蚀剂结构见相关的位置，例如，B44C，H01L，例如，H01L21/00，H05K）
G03F7/20	.曝光及其设备（复制用照相印制设备入G03B27/00）