Invention Grant
- Patent Title: Eight spring dual substrate MEMS plate switch and method of manufacture
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Application No.: US16515943Application Date: 2019-07-18
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Publication No.: US11305982B2Publication Date: 2022-04-19
- Inventor: Christopher S. Gudeman , Paul Rubel
- Applicant: Innovative Micro Technology
- Applicant Address: US CA Goleta
- Assignee: Innovative Micro Technology
- Current Assignee: Innovative Micro Technology
- Current Assignee Address: US CA Goleta
- Agent Jaquelin K. Spong
- Main IPC: H02K3/00
- IPC: H02K3/00 ; B81B3/00

Abstract:
Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. A two-fold symmetric switch may be formed by a primary, secondary, and optionally tertiary set of voids formed in the movable plate. These voids may define the spring beams which provide a stable and reliable restoring force to the switch.
Public/Granted literature
- US20210017017A1 EIGHT SPRING DUAL SUBSTRATE MEMS PLATE SWITCH AND METHOD OF MANUFACTURE Public/Granted day:2021-01-21
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