Invention Grant
- Patent Title: Polycrystalline silicon rod and method for producing same
-
Application No.: US16310532Application Date: 2017-06-21
-
Publication No.: US11306001B2Publication Date: 2022-04-19
- Inventor: Kazuyuki Ito
- Applicant: MITSUBISHI MATERIALS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI MATERIALS CORPORATION
- Current Assignee: MITSUBISHI MATERIALS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Locke Lord LLP
- Priority: JPJP2016-124042 20160623
- International Application: PCT/JP2017/022783 WO 20170621
- International Announcement: WO2017/221952 WO 20171228
- Main IPC: C01B33/035
- IPC: C01B33/035 ; C01B33/02 ; C23C16/24 ; C23C16/46

Abstract:
The present invention provides a polycrystalline silicon rod whose rod surface portion has a phosphorus concentration of 0.015 ppba or less, in which the ratio (P2/P1) of the phosphorus concentration (P2) of the rod center portion to the phosphorus concentration (P1) of the rod surface portion is within the range of 2 or lower. The present invention also provides a method for producing a polycrystalline silicon rod by the Siemens method that assembles a polycrystalline silicon seed rod in a reactor, then heats the seed rod up to a temperature of 1000° C. or more and less than the melting point of silicon by energization heating, and supplies a raw material gas including trichlorosilane gas and hydrogen gas as the main components to the reactor at the heating temperature to deposit and grow silicon on the seed rod surface.
Public/Granted literature
- US20190248657A1 POLYCRYSTALLINE SILICON ROD AND METHOD FOR PRODUCING SAME Public/Granted day:2019-08-15
Information query
IPC分类: