Invention Grant
- Patent Title: Alumina sintered body, method for manufacturing the same, and part for semiconductor manufacturing apparatus
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Application No.: US16635937Application Date: 2018-07-31
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Publication No.: US11306029B2Publication Date: 2022-04-19
- Inventor: Shunichi Eto , Osanobu Fukuo , Kiyotaka Saitou
- Applicant: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
- Applicant Address: JP Tokyo
- Assignee: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
- Current Assignee: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JPJP2017-148815 20170801
- International Application: PCT/JP2018/028547 WO 20180731
- International Announcement: WO2019/026871 WO 20190207
- Main IPC: C04B35/10
- IPC: C04B35/10 ; C04B35/626 ; C04B35/64 ; H01L21/67
Abstract:
An alumina sintered body comprising 0.01 to 1.0 mass % of one or more types selected from Ta, Nb, and V in terms of oxide thereof. The alumina sintered body may further comprise 0.01 to 1.0 mass % of Mg in terms of Mg oxide. It is particularly preferable that the alumina sintered body has an alumina purity of 99% or more. An alumina sintered body having low dielectric loss as compared with that in related art can therefore be produced at low cost.
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