A pump chamber (32a), valve chambers (33a and 33b), discharge holes (33e and 33f), and flow paths (34 and 35) are integrally provided to each other in a housing (30), so that the pressure loss of the cleaning liquid “W” can be reduced. In addition, since valve chambers of the flow paths extend to the discharge holes, the cleaning liquid flowing out of the flow paths can be discharged at a portion closer to the central of the valve chambers. As a result, the outlet portions of the flow paths and the inlet portions of the discharge holes is brought closer to each other, and the turbulent of the cleaning liquid in the valve chambers can be suppressed, thereby reducing the pressure loss.