Invention Grant
- Patent Title: Carrying device and fixing method of carrying device
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Application No.: US16470566Application Date: 2019-02-25
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Publication No.: US11306788B2Publication Date: 2022-04-19
- Inventor: Wei Wang
- Applicant: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN Hubei
- Assignee: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Hubei
- Agency: Soroker Agmon Nordman
- Priority: CN201811118597.4 20180919
- International Application: PCT/CN2019/076081 WO 20190225
- International Announcement: WO2020/057058 WO 20200326
- Main IPC: F16D63/00
- IPC: F16D63/00 ; G03F7/20 ; F16D121/20

Abstract:
A carrying device and, a fixing method of a carrying device are provided. The carrying device includes a body and an electromagnet fixing module disposed on the body; wherein the electromagnet fixing module is configured to fix the carrying device. The present application uses the electromagnet fixing module to fix the carrying device, which can avoid downtime of an exposure machine caused by shaking of the carrying device when a robot arm of the exposure machine picks or places the mask form the carrying device so as to improve throughput.
Public/Granted literature
- US20210404522A1 CARRYING DEVICE AND FIXING METHOD OF CARRYING DEVICE Public/Granted day:2021-12-30
Information query
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