Invention Grant
- Patent Title: Quick release purge valve and substrate container using same
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Application No.: US17102920Application Date: 2020-11-24
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Publication No.: US11306841B2Publication Date: 2022-04-19
- Inventor: Ming-Chien Chiu , Chia-Ho Chuang , Hsin-Min Hsueh
- Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.
- Applicant Address: TW New Taipei
- Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD.
- Current Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD.
- Current Assignee Address: TW New Taipei
- Agency: Locke Lord LLP
- Agent Tim Tingkang Xia, Esq.
- Main IPC: F16K24/04
- IPC: F16K24/04 ; B01D46/42 ; B01D46/10 ; F16K27/02 ; H01L21/677

Abstract:
A quick release purge valve and a substrate container using same are provided. The container includes a base which has a cover plate and a bottom plate. The quick release purge valve includes a snap plate, a gasket fitting, and a valve element. The snap plate detachably engages with the bottom plate and is at most evenly aligned with the bottom plate. The gasket fitting is disposed between the cover plate and the bottom plate and has an airflow conduit communicating the two plates. The valve element is disposed in the conduit for limiting a flow direction of the gas. The gasket fitting is fixed in the base when the snap plate and the bottom plate are in an engaged state and is removable from the base when the snap plate and the bottom plate are in a disengaged state.
Public/Granted literature
- US20210080020A1 QUICK RELEASE PURGE VALVE AND SUBSTRATE CONTAINER USING SAME Public/Granted day:2021-03-18
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