Invention Grant
- Patent Title: Storage tank, and material vaporization device and liquid material supply device provided with storage tank
-
Application No.: US16467707Application Date: 2017-12-12
-
Publication No.: US11306913B2Publication Date: 2022-04-19
- Inventor: Shinji Taniguchi
- Applicant: HORIBA STEC, Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Alleman Hall Creasman & Tuttle LLP
- Priority: JPJP2016-242745 20161214
- International Application: PCT/JP2017/044549 WO 20171212
- International Announcement: WO2018/110545 WO 20180621
- Main IPC: F22B3/02
- IPC: F22B3/02 ; F17C7/04 ; H01L21/00
Abstract:
The present invention is a storage tank including: a tank; a tank main body that stores a liquid material; a cover body that covers an opening of the tank main body; a support body that is positioned opposite to the cover body; a seal body that is sandwiched by a flange provided at the opening end of the tank main body and the cover body; and tightening members that tighten the cover body and the support body, and is capable of, even when the thickness of the flange provided at the opening end of the tank main body is thin, attaching the cover body on the flange while maintaining a contact property.
Public/Granted literature
Information query
