Invention Grant
- Patent Title: Two-degree-of-freedom heterodyne grating interferometry measurement system
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Application No.: US17257219Application Date: 2019-06-26
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Publication No.: US11307018B2Publication Date: 2022-04-19
- Inventor: Yu Zhu , Ming Zhang , Leijie Wang , Fuzhong Yang , Rong Cheng , Xin Li , Weinan Ye , Jinchun Hu
- Applicant: TSINGHUA UNIVERSITY , BEIJING U-PRECISION TECH CO., LTD.
- Applicant Address: CN Beijing; CN Beijing
- Assignee: TSINGHUA UNIVERSITY,BEIJING U-PRECISION TECH CO., LTD.
- Current Assignee: TSINGHUA UNIVERSITY,BEIJING U-PRECISION TECH CO., LTD.
- Current Assignee Address: CN Beijing; CN Beijing
- Agency: Holzer Patel Drennan
- Priority: CN201810709970.7 20180702
- International Application: PCT/CN2019/092922 WO 20190626
- International Announcement: WO2020/007218 WO 20200109
- Main IPC: G01B9/02003
- IPC: G01B9/02003 ; G01B9/02015 ; G01B11/06 ; G01B9/02

Abstract:
A two-degree-of-freedom heterodyne grating interferometry measurement system, comprising: a single-frequency laser device for emitting a single-frequency laser, and the single-frequency laser can be split into a beam of reference light and a beam of measurement light; an interferometer mirror group and a measurement grating for forming a reference interference signal and a measurement interference signal from the reference light and the measurement light; and a receiving optical fiber for receiving the reference interference signal and the measurement interference signal, wherein a core diameter of the receiving optical fiber is smaller than a width of an interference fringe of the reference interference signal and the measurement interference signal, so that the receiving optical fiber receives a part of the reference interference signal and the measurement interference signal. The measurement system has advantages of insensitivity to grating rotation angle error, small volume, light weight, and a facilitating arrangement.
Public/Granted literature
- US20210164772A1 TWO-DEGREE-OF-FREEDOM HETERODYNE GRATING INTERFEROMETRY MEASUREMENT SYSTEM Public/Granted day:2021-06-03
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