Invention Grant
- Patent Title: Vibrator device, electronic apparatus, and vehicle
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Application No.: US16827809Application Date: 2020-03-24
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Publication No.: US11307033B2Publication Date: 2022-04-19
- Inventor: Ryuta Nishizawa , Seiichiro Ogura , Keiichi Yamaguchi
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2019-057447 20190325
- Main IPC: G01C19/5705
- IPC: G01C19/5705

Abstract:
Provided is a vibrator device including a vibrator structure body. When the A axis, the B axis, and the C axis are three axes orthogonal to each other, the vibrator structure body includes a vibrator element and a support substrate that is aligned with the vibrator element along the C axis. The vibrator element includes vibrating arms configured to flexurally vibrate along a plane parallel to the A axis and the B axis and along the A axis. The support substrate includes a base that supports the vibrator element, a support that supports the base, and a beam that couples the base and the support. A relationship f0
Public/Granted literature
- US20200309526A1 VIBRATOR DEVICE, ELECTRONIC APPARATUS, AND VEHICLE Public/Granted day:2020-10-01
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