Invention Grant
- Patent Title: In-tool ESD events selective monitoring method and apparatus
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Application No.: US15267640Application Date: 2016-09-16
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Publication No.: US11307235B2Publication Date: 2022-04-19
- Inventor: Lyle D. Nelsen , Steven B. Heymann , Mark E. Hogsett
- Applicant: Illinois Tool Works Inc.
- Applicant Address: US IL Glenview
- Assignee: Illinois Tool Works Inc.
- Current Assignee: Illinois Tool Works Inc.
- Current Assignee Address: US IL Glenview
- Agency: McAndrews, Held & Malloy, Ltd.
- Main IPC: G01R31/00
- IPC: G01R31/00 ; H02H1/00 ; G01R31/28 ; G01R35/00

Abstract:
An embodiment of the invention provides an apparatus for detecting electrostatic discharges (ESD) events, comprising: an ESD detector configured to determine at least one process window that will permit the ESD detector to detect an ESD event; at least one antenna coupled to said ESD detector; and said ESD detector calibrated for at least one discharge energy. Another embodiment of the invention provides: a method for detecting electrostatic discharges (ESD) events, comprising: determining at least one process window that will permit an ESD detector to detect an ESD event; and calibrating the ESD detector for at least one discharge energy.
Public/Granted literature
- US20170131336A1 In-tool ESD Events Selective Monitoring Method And Apparatus Public/Granted day:2017-05-11
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