Invention Grant
- Patent Title: Method for measuring an electric property of a test sample
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Application No.: US16753607Application Date: 2020-03-18
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Publication No.: US11307245B2Publication Date: 2022-04-19
- Inventor: Alberto Cagliani , Frederik Westergaard Østerberg , Chia-Hung Wei
- Applicant: KLA CORPORATION
- Applicant Address: US CA Milpitas
- Assignee: KLA CORPORATION
- Current Assignee: KLA CORPORATION
- Current Assignee Address: US CA Milpitas
- Agency: Hodgson Russ LLP
- Priority: EP19167346 20190404
- International Application: PCT/US2020/023232 WO 20200318
- International Announcement: WO2020/205236 WO 20201008
- Main IPC: G01R31/28
- IPC: G01R31/28 ; H01L27/22 ; H01L43/02 ; G01R1/04 ; G01R31/26 ; G11C29/50

Abstract:
The method may be used for measuring an electric property of a magnetic tunnel junction used in an embedded MRAM memory for example. The method uses a multi point probe with a plurality of probe tips for contacting a designated area of the test sample, which is electrically insulated from the part of the test sample which is to be tested. Electrically connections are placed underneath the magnetic tunnel junction and goes to the designated area.
Public/Granted literature
- US20210231731A1 Method for Measuring An Electric Property of a Test Sample Public/Granted day:2021-07-29
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